Modelling and Control of a Vacuum Air Bearing Linear Drive in the Nanometer Range
Stadler, Paul Andreas 2008. Modelling and Control of a Vacuum Air Bearing Linear Drive in the Nanometer Range. PhD Thesis University of East London School of Architecture, Computing and Engineering
|Authors||Stadler, Paul Andreas|
The limits for the positioning accuracy of a direct linear drive based on a vacuum air bearing with a voice coil for high precision positioning are investigated using different control techniques.
The original contributions of this research are as follows:
At the outset, it was found necessary to mount the vacuum air bearing on a large seismic block to eliminate vibration modes that would impair the positioning accuracy. The aforementioned rotational vibration mode, however, remained. An initial attempt was made to alleviate this
In summary, the research has led to control techniques that can be recommended for motion control systems based on vacuum air bearings whose positioning accuracy has to be in the nanometer range.
|Keywords||Linear drives; High precision systems; Vacuum air bearings|
|Publication process dates|
|Deposited||13 Jan 2014|
This thesis supplied via ROAR to UEL-registered users is protected by copyright and other intellectual property rights, and duplication of any part of the material is not permitted, except for your personal use for the purposes of non-commercial research and private study in electronic or print form. You must obtain permission from the copyright-holder for any other use. Electronic or print copies may not be offered, for sale or otherwise, to anyone. No quotation from the thesis may be published without proper acknowledgement.
File Access Level
Registered users only
1views this month
0downloads this month