Modelling and Control of a Vacuum Air Bearing Linear Drive in the Nanometer Range
Stadler, Paul Andreas 2008. Modelling and Control of a Vacuum Air Bearing Linear Drive in the Nanometer Range. PhD Thesis University of East London School of Architecture, Computing and Engineering
|Authors||Stadler, Paul Andreas|
The limits for the positioning accuracy of a direct linear drive based on a vacuum air bearing with a voice coil for high precision positioning are investigated using different control techniques.
The original contributions of this research are as follows:
At the outset, it was found necessary to mount the vacuum air bearing on a large seismic block to eliminate vibration modes that would impair the positioning accuracy. The aforementioned rotational vibration mode, however, remained. An initial attempt was made to alleviate this
In summary, the research has led to control techniques that can be recommended for motion control systems based on vacuum air bearings whose positioning accuracy has to be in the nanometer range.
|Keywords||Linear drives; High precision systems; Vacuum air bearings|
|Publication process dates|
|Deposited||13 Jan 2014|
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