Observer based robust control of a linear motor actuated vacuum air bearing

Conference paper


Stadler, Paul A., Dodds, Stephen J. and Wild, Harald G. 2007. Observer based robust control of a linear motor actuated vacuum air bearing. Proceedings of Advances in Computing and Technology. (AC&T) The School of Computing and Technology 2nd Annual Conference University of East London pp. 212-221
AuthorsStadler, Paul A., Dodds, Stephen J. and Wild, Harald G.
TypeConference paper
Abstract

A vacuum air bearing based linear drive is to be positioned with a relative accuracy in the
nanometer range. This is achieved by use of the new control technique, observer based robust control
(OBRC) originated by the second named author and its motion control application published here for
the first time. It is shown that the amplitude of the vibration mode of the vacuum air bearing excited by
motion of the air molecules in the vacuum air bearing can be reduced from ±20nm (using a cascaded
controller) to ±10nm using OBRC. Comparisons are made between simulations and experiments.

Keywordswafer inspection systems; semiconductor; vacuum air; motion control application
Year2007
ConferenceProceedings of Advances in Computing and Technology
Accepted author manuscript
License
CC BY-ND
Publication dates
Print2007
Publication process dates
Deposited22 Jul 2010
Web address (URL)http://www.uel.ac.uk/act/proceedings/documents/ACT07.pdf
http://hdl.handle.net/10552/886
Additional information

Citation:
Stadler, P.A.; Dodds, S.J.; Wild, H.G. (2007) ‘Observer based robust control of a linear motor actuated vacuum air bearing’ Proceedings of Advances in Computing and Technology, (AC&T) The School of Computing and Technology 2nd Annual Conference, University of East London, pp.212-221.

Place of publicationUniversity of East London
Page range212-221
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https://repository.uel.ac.uk/item/866xv

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